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Mode transition induced by low-frequency current in dual-frequency capacitive discharges

H C Kim1, J K Lee

  • 1Department of Electronic and Electrical Engineering, Pohang University of Science and Technology, Pohang 790-784, Republic of Korea.

Physical Review Letters
|September 28, 2004
PubMed
Summary

Varying low-frequency current in argon discharges shifts electron distribution functions from Druyvesteyn to bi-Maxwellian or Maxwellian types. This transition is linked to changes in electron properties and the alpha-gamma mode shift.

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