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3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
Published on: April 29, 2020
Determination of the local concentrations of Mn interstitials and antisite defects in GaMnAs
F Glas1, G Patriarche, L Largeau
1Laboratoire de Photonique et de Nanostructures, CNRS, route de Nozay, 91460 Marcoussis, France.
Abstract:
We present a method for the determination of the local concentrations of interstitial and substitutional Mn atoms and As antisite defects in GaMnAs. The method relies on the sensitivity of the structure factors of weak reflections to the concentrations and locations of these minority constituents. High spatial resolution is obtained by combining structure factor measurement and x-ray analysis in a transmission electron microscope. We demonstrate the prevalence of interstitials with As nearest neighbors in as-grown layers.

