Chien-Hung Liu1, Wen-Yuh Jywe, Chao-Kwai Chen
1Institute of Electro-Optical and Materials Science, National Huwei University of Science and Technology, Huwei, Yunlin 632, Taiwan. carus@ckit.edu.tw
This study introduces a novel diffraction-type optical triangulation sensor. The sensor simultaneously measures linear displacement and three angular motion errors of moving objects using laser triangulation.
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