Infrared diode laser absorption spectroscopy of C(2)H(2) and C(2)H(6) in capacitively coupled methane RF discharges

A Serdioutchenko1, I Möller, H Soltwisch

  • 1Institute for Experimental Physics V, Ruhr-University Bochum, Universitätsstrasse 150, 44780 Bochum, Germany. serdioutchenko@ep5.ruhr-uni-bochum.de

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