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Three-dimensional hydrogen microscopy in diamond.

P Reichart1, G Datzmann, A Hauptner

  • 1Physik Department E12, Technische Universität (TU) München, 85748 Garching, Germany. p.reichart@ph.unimelb.edu.au

Science (New York, N.Y.)
|November 30, 2004
PubMed
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This study quantitatively images hydrogen in diamond films, revealing most hydrogen resides at grain boundaries, not within grains. This finding is crucial for understanding polycrystalline diamond

Area of Science:

  • Materials Science
  • Solid-State Physics
  • Surface Science

Background:

  • Polycrystalline diamond (PCD) properties are influenced by impurities, particularly hydrogen.
  • Understanding hydrogen distribution is key to optimizing PCD for electronic applications.
  • Previous methods lacked the resolution and sensitivity to map hydrogen at grain boundaries.

Purpose of the Study:

  • To quantitatively image three-dimensional hydrogen distributions in undoped PCD films.
  • To determine the precise location and concentration of hydrogen within PCD.
  • To elucidate the role of hydrogen at grain boundaries in PCD.

Main Methods:

  • Utilized a 17 MeV proton microprobe for high-resolution, high-sensitivity 3D hydrogen imaging.
  • Analyzed <110>-textured undoped polycrystalline diamond films.

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  • Achieved lateral resolution better than 1 micrometer.

    • Main Results:

    • Most hydrogen was localized at grain boundaries in the PCD film.
    • Average hydrogen concentration at grain boundaries was (8.1 ± 1.5) x 10^14 atoms/cm², about one-third of a monolayer.
    • Hydrogen content within the diamond grains was below the detection limit of 1.4 x 10^16 atoms/cm³ (0.08 ppm).

    Conclusions:

    • Chemical vapor deposition (CVD)-grown diamond has a low bulk hydrogen content.
    • Hydrogen predominantly segregates to grain boundaries in PCD.
    • Grain boundary hydrogen concentration is significant and likely impacts electronic properties of PCD.