Sadik Hafizovic1, Diego Barrettino, Tormod Volden
1Physical Electronics Laboratory, Swiss Federal Institute of Technology, Hoenggerberg HPT-H4.2, Wolfgang-PauliStrasse 16, 8093 Zurich, Switzerland.
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This study presents a compact, single-chip atomic force microscopy (AFM) unit. This microelectromechanical system (MEMS) enables high-speed, cost-effective nanoscale imaging without external controllers.
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