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Voltage refinement by deficit HOLZ line geometry.

Chris J Rossouw1, Christian J Maunders

  • 1CSIRO Manufacturing and Infrastructure Technology, Private Bag 33, Clayton South MDC and School of Physics and Materials Engineering, Monash University, Clayton, Victoria 3169, Australia. chris.rossouw@csiro.au

Journal of Electron Microscopy
|December 8, 2004
PubMed
Summary

Accurate electron beam voltage refinement requires accounting for dynamical scattering effects, especially for higher-index zone axes. Neglecting these corrections introduces systematic errors, impacting the precision and accuracy of measurements.

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Area of Science:

  • Materials Science
  • Solid-State Physics
  • Electron Microscopy

Background:

  • Electron beam voltage is a critical parameter in electron microscopy and diffraction.
  • Kinematic scattering approximations are often used for simplicity but may lack accuracy.
  • Dynamical scattering effects become significant for certain crystal orientations and electron energies.

Purpose of the Study:

  • To describe and apply a method for refining electron beam voltage using deficit line intersections.
  • To investigate the necessity of dynamical corrections in electron diffraction analysis.
  • To compare voltage refinement accuracy between kinematic and dynamical scattering approximations.

Main Methods:

  • Utilized a quasi-kinematic scattering approximation for initial analysis.

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  • Applied the method to a silicon standard for experimental validation.
  • Incorporated dynamical corrections for higher-index zone axes (e.g., 310, 411).

    • Main Results:

    • Dynamical corrections were found to be essential for higher-index zone axes.
    • A single deficit line associated with a dominant Bloch state was observed.
    • Significant differences in refined voltage were noted compared to purely kinematic approximations.

    Conclusions:

    • Neglecting dynamical corrections introduces systematic errors, compromising accuracy in voltage and lattice parameter measurements.
    • High precision can be achieved with kinematic methods, but accuracy is diminished without dynamical considerations.
    • Experimental confirmation of dynamical correction differences for specific zones (310, 411) was achieved for 100-300 keV electrons.