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Updated: Aug 20, 2026
Electrophoretic Crystallization of Ultrathin High-performance Metal-organic Framework Membranes
Published on: August 16, 2018
Ultralow-k nanoporous organosilicate dielectric films imprinted with dendritic spheres
Byeongdu Lee1, Young-Hee Park, Yong-Taek Hwang
1Department of Chemistry, Center for Integrated Molecular Systems, Pohang Accelerator Laboratory, Polymer Research Institute, and Division of Molecular and Life Sciences, Pohang University of Science and Technology, Pohang 790-784, Republic of Korea.
Abstract:
Integrated circuits that have improved functionality and speed in a smaller package and that consume less power are desired by the microelectronics industry as well as by end users, to increase device performance and reduce costs. The fabrication of high-performance integrated circuits requires the availability of materials with low or ultralow dielectric constant (low-k: k
