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Elemental distribution in fluorinated amorphous carbon thin films.

A Lamperti1, C E Bottani, P M Ossi

  • 1Dipartimento di Ingegneria Nucleare, and Centre of Excellence Nano Engineered Materials and Surfaces (NEMAS), Politecnico di Milano, Milan, Italy. alessio.lamperti@polimi.it

Journal of the American Society for Mass Spectrometry
|January 18, 2005
PubMed
Summary

This study used focused ion beam-secondary ion mass spectrometry (FIB-SIMS) to analyze fluorinated carbon films. Findings reveal fluorine distribution correlates with film hardness and microstructure, suggesting a fluorine-for-hydrogen substitution mechanism.

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Area of Science:

  • Materials Science
  • Surface Science
  • Analytical Chemistry

Background:

  • Amorphous fluorinated carbon thin films are crucial for various applications.
  • Understanding their microstructure and properties is essential for material optimization.
  • Plasma-assisted chemical vapor deposition (PACVD) is a common deposition method.

Purpose of the Study:

  • To analyze the micro- to nano-scale structure of PACVD-deposited amorphous fluorinated carbon films.
  • To investigate the distribution of contaminants and their impact on film properties.
  • To propose a mechanism for film formation based on experimental observations.

Main Methods:

  • Focused ion beam-secondary ion mass spectrometry (FIB-SIMS) with 20 nm spatial resolution.
  • Acquisition of mass spectra and ion imaging of film surfaces.
  • Complementary analysis using infrared and Raman spectroscopies.

Main Results:

  • Secondary ion distribution images revealed distinct patterns for F(-), CH(-), and CF(-).
  • Fluorine-rich areas showed changes in size and topology, correlating with film hardness.
  • Microstructure transitions from diamond-like to polymer-like were observed.
  • A correlation between vibrational spectroscopy and surface ion distributions was established.

Conclusions:

  • A mechanism of fluorine substitution for hydrogen is proposed based on FIB-SIMS and spectroscopy data.
  • The study provides insights into the structure and microstructure of amorphous fluorinated carbon films.
  • FIB-SIMS is demonstrated as a powerful tool for nanoscale material characterization.