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Recent developments and new strategies in scanning electron microscopy.

J Cazaux1

  • 1LASSI/UTAP Faculté des Sciences BP 1039, 51687 Reims Cedex 2, France. jacques.cazaux@univ-reims.fr

Journal of Microscopy
|January 19, 2005
PubMed
Summary

This study explores how varying electron beam energy and detection angles in scanning electron microscopy (SEM) creates image contrast. Understanding these parameters enhances specimen analysis and avoids nanometrology errors.

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Area of Science:

  • Materials Science
  • Physics
  • Microscopy

Background:

  • Scanning electron microscopy (SEM) offers improved lateral resolution.
  • Recent advancements allow broad tuning of incident beam energy (E(0)) and secondary electron take-off angle (α).

Purpose of the Study:

  • To investigate how varying E(0) and α affects SEM image contrast.
  • To interpret observed image differences based on secondary electron emission yield variations.
  • To provide a strategy for optimizing image acquisition in SEM.

Main Methods:

  • Acquisition of multiple SEM images from the same specimen field of view with varied parameters.
  • Analysis of secondary electron emission yield (δ) as a function of E(0) and α.
  • Correlation of secondary electron (SE) and backscattered electron (BSE) images using scatter diagrams.

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  • Consideration of charging effects and contrast reversal.

    • Main Results:

    • Identified origins of chemical and topographic contrast.
    • Demonstrated the utility of scatter diagrams for image comparison.
    • Highlighted the distinction between lateral resolution and minimum detectable detail for nanometrology.
    • Suggested causes for contrast reversal.

    Conclusions:

    • Varying primary beam energy and take-off angle offers control over SEM image contrast for conductive specimens.
    • Adjusting working distance or beam intensity is suitable for high-resolution imaging.
    • Modifying scanning frequency aids in imaging insulating specimens.
    • A systematic approach to image acquisition by altering one parameter at a time is recommended.