Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Experiment Videos

1.156-GHz self-aligned vibrating micromechanical disk resonator.

Jing Wang1, Zeying Ren, Clark T C Nguyen

  • 1Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109-2122, USA. jingw@umich.edu

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|February 5, 2005
PubMed
Summary
This summary is machine-generated.

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Mechanisms involved in ceramide-induced cell cycle arrest in human hepatocarcinoma cells.

World journal of gastroenterology·2007
Same author

A population-based survey of women's traditional postpartum behaviours in Northern China.

Midwifery·2007
Same author

A glimpse of streptococcal toxic shock syndrome from comparative genomics of S. suis 2 Chinese isolates.

PloS one·2007
Same author

Colon carcinoma cells harboring PIK3CA mutations display resistance to growth factor deprivation induced apoptosis.

Molecular cancer therapeutics·2007
Same author

[Surgical treatment of 402 consecutive cases for hilar cholangiocarcinoma: Chinese single center experience].

Zhonghua wai ke za zhi [Chinese journal of surgery]·2007
Same author

Highly convergent route to cyclopeptide alkaloids: total synthesis of ziziphine N.

Organic letters·2007
Same journal

Theoretical Foundations of the Echo Envelope Statistical Modeling: A Tutorial.

IEEE transactions on ultrasonics, ferroelectrics, and frequency control·2025
Same journal

Practical Demonstrations of FR3-Band Thin-Film Lithium Niobate Acoustic Filter Design.

IEEE transactions on ultrasonics, ferroelectrics, and frequency control·2025
Same journal

Real-Time Heterogeneous Helical Wave Spectrum Method for Transabdominal Passive Acoustic Mapping.

IEEE transactions on ultrasonics, ferroelectrics, and frequency control·2025
Same journal

Cascaded Plane Wave Ultrasound Velocity Vector Imaging: In Vivo Feasibility in Carotid Arteries.

IEEE transactions on ultrasonics, ferroelectrics, and frequency control·2025
Same journal

Quantitative Acoustic Attenuation Scanning Using a Phase-Insensitive Ultrasound Computed Tomography System.

IEEE transactions on ultrasonics, ferroelectrics, and frequency control·2025
Same journal

FPGA-Accelerated CNN Reconstruction for Low-Power Sparse-Array Ultrasound Imaging.

IEEE transactions on ultrasonics, ferroelectrics, and frequency control·2025
See all related articles

Researchers developed a new fabrication method for self-aligned micromechanical disk resonators. This innovation enables gigahertz frequencies with high quality factors (Q) in both air and vacuum.

Area of Science:

  • Microelectromechanical Systems (MEMS)
  • Materials Science
  • Electrical Engineering

Background:

  • Traditional fabrication methods for micromechanical resonators face challenges in achieving precise alignment, impacting performance.
  • Achieving high-frequency operation (GHz range) with high quality factors (Q) is crucial for advanced sensing and communication applications.

Purpose of the Study:

  • To introduce a novel fabrication methodology enabling self-alignment of micromechanical structures.
  • To demonstrate the performance of polysilicon micromechanical disk resonators fabricated using this new technique, focusing on resonance frequency and Q factor.

Main Methods:

  • Utilized a new fabrication process allowing self-alignment of the resonator's stem to the disk's center.
  • Fabricated polysilicon micromechanical disk resonators operating in a radial-contour mode.

Related Experiment Videos

  • Characterized resonator performance, including resonance frequency and Q factor, in both vacuum and air environments.

    • Main Results:

    • Achieved resonance frequencies up to 1.156 GHz with Q factors >2,650 at this frequency in both vacuum and air.
    • Demonstrated a 734.6-MHz resonator with Q factors of 7,890 (vacuum) and 5,160 (air).
    • The self-alignment technique significantly improved resonator balancing, enabling high Q at gigahertz frequencies for the first time.

    Conclusions:

    • The novel self-alignment fabrication method is effective for producing high-performance micromechanical disk resonators.
    • These resonators demonstrate potential for applications requiring high-frequency operation and high Q factors.
    • An equivalent electrical circuit model was developed to accurately predict the performance of these disk resonators.