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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
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Structural characterization of TiN/NbN multilayers: X-ray diffraction, energy-filtered TEM and Fresnel contrast

S J Lloyd1, J M Molina-Aldareguia, W J Clegg

  • 1Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge CB2 3QZ, UK. sjl16@cus.cam.ac.uk

Journal of Microscopy
|February 24, 2005
PubMed

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