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Related Experiment Videos

Electro-acoustical characterization procedure for cMUTs.

Marta Buigas1, Francisco Montero de Espinosa, Georg Schmitz

  • 1GDS, Universitat Politècnica de Catalunya, UPC-Campus Nord, Ed. C4, Jordi Girona 1-3, 08034 Barcelona, Spain.

Ultrasonics
|March 2, 2005
PubMed
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This study presents a new method for characterizing micro-acoustic resonators (cMUTs) in air. The procedure accurately determines cMUT parameters and impulse response using electrical impedance and a novel send-and-receive experiment.

Area of Science:

  • Acoustics
  • Microelectromechanical Systems (MEMS)
  • Electrical Engineering

Background:

  • Characterizing capacitive micro-machined ultrasonic transducers (cMUTs) is crucial for their application.
  • Existing methods may require complex deconvolution or lack accuracy in air.

Purpose of the Study:

  • To develop and validate a procedure for the electro-acoustical characterization of cMUTs in air.
  • To accurately determine cMUT parameters and impulse response using a simplified experimental setup.

Main Methods:

  • Input electrical impedance measurements were used to fit the Mason model and calculate transducer parameters at various bias voltages.
  • A send-and-receive experiment was performed to obtain the cMUT impulse response.
  • An ad hoc broadband piezoelectric transducer was fabricated to minimize emitter influence, eliminating the need for deconvolution.

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Main Results:

  • The Mason model accurately predicted cMUT parameters and impulse response.
  • The developed procedure successfully characterized two cMUTs with different membrane diameters (60 and 70 microm).
  • The use of a specialized transducer simplified the impulse response measurement.

Conclusions:

  • The reported procedure provides an effective and simplified method for the electro-acoustical characterization of cMUTs in air.
  • This method facilitates accurate parameter extraction and impulse response analysis for cMUT devices.