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Planarizing surface topography by polymer adhesion to water-soluble templates with replicated null pattern

Charles D Schaper1

  • 1Department of Electrical Engineering, Stanford University, Stanford, California 94305-9510, USA. cschaper@stanford.edu

Summary

This study presents a novel method for creating flat surfaces using water-soluble polymer templates. This technique effectively reduces surface topography from micrometers to nanometers, offering a new approach to surface planarization.

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