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Related Experiment Videos

Versatile micromirror with a multimovement mode.

Hongbin Yu1, Haiqing Chen, Sai Fu

  • 1Department of Optoelectronics Engineering, Huazhong University of Science and Technology, Wuhan 430074, China. yhb_hust@yahoo.com

Applied Optics
|March 16, 2005
PubMed
Summary
This summary is machine-generated.

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A novel 3x3 micromirror array was fabricated using silicon surface micromachining. This device modulates light

Area of Science:

  • Microelectromechanical Systems (MEMS)
  • Optics
  • Materials Science

Background:

  • Micromirror arrays are crucial components in optical systems for light modulation.
  • Advanced fabrication techniques are needed to create high-performance micromirror devices.

Purpose of the Study:

  • To design and fabricate a 3x3 micromirror array.
  • To investigate the light modulation capabilities (phase and amplitude) of the fabricated array.

Main Methods:

  • Utilized multilayer silicon surface micromachining technology.
  • Designed a structure comprising a bottom electrode, supporting part, and mirror plate.

Main Results:

  • Successfully fabricated a functional 3x3 micromirror array.

Related Experiment Videos

  • Achieved a maximum vertical deflection of 2 micrometers.
  • Demonstrated rotation angles of +/-2.3 degrees (Y-axis) and +/-1.45 degrees (X-axis).

    • Conclusions:

    • The fabricated micromirror array effectively modulates incident light.
    • Device performance, specifically deflection, can be enhanced by adjusting sacrificial layer thickness.