Prospects for aberration-free electron microscopy
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Updated: Aug 19, 2026

Picometer-Precision Atomic Position Tracking through Electron Microscopy
Published on: July 3, 2021
1Institute of Applied Physics, Darmstadt University of Technology, Hochschulstrasse 6, Darmstadt D-64289, Germany. rose@ltoi.iap.physik.tu-darmstadt.de
Abstract:
Future aberration-corrected electron microscopes that will enable sub-Angstroem spatial and sub-eV energy resolution are outlined . The sub-Angstroem transmission electron microscope (SATEM) only compensates for the spherical aberration and reduces the chromatic aberration disc by means of a monochromator. In order to correct for both aberrations, two novel correctors, the ultracorrector and the superaplanator are proposed which will yield a resolution limit of about 0.5A and a large field of view of more than 4 x 10(6) image points. The superaplanator is best suited for obtaining an achromatic aplanat required for the realization of the high-performance in situ electron microscope of the TEAM project.
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