Roughening rates of strained-layer instabilities

Fumiya Watanabe1, David G Cahill, J E Greene

  • 1Department of Materials Science and Engineering and the Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois, 61801, USA.

Summary

Silicon-germanium (SiGe) strained layer morphology was investigated. Ripple patterns formed on textured substrates, with initial roughening suppressed but occurring slower than theory predicted.

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