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Related Experiment Videos

Two-dimensional thickness measurements based on internal reflection ellipsometry.

Soichi Otsuki1, Kaoru Tamada, Shin-ichi Wakida

  • 1Single-Molecule Bioanalysis Laboratory, National Institute of Advanced Industrial Science and Technology (AIST), Hayashi-cho, Takamatsu 761-0395, Japan. otsuki-s@aist.go.jp

Applied Optics
|March 31, 2005
PubMed
Summary

This study introduces an imaging ellipsometer for measuring thin film thickness distribution. The technique enhances precision and sensitivity, achieving a detection limit of +/- 0.2 nm for protein films.

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Area of Science:

  • Optical Physics
  • Materials Science
  • Biophysics

Background:

  • Accurate thin film thickness measurement is crucial for various applications.
  • Internal reflection geometry in ellipsometry offers potential for enhanced sensitivity.
  • Developing non-contact, high-resolution methods for analyzing thin films is an ongoing challenge.

Purpose of the Study:

  • To describe an imaging ellipsometer technique using internal reflection geometry.
  • To demonstrate the measurement of thin film thickness distribution with an assumed refractive index.
  • To validate the use of a high-index additional layer for improved measurement sensitivity and precision.

Main Methods:

  • Utilized an imaging ellipsometer in internal reflection geometry with a prism.

Related Experiment Videos

  • Employed an optical system consisting of silica substrate-TiO2 layer-silica layer-protein film-air.
  • Performed two-dimensional thickness estimation of protein films based on the measured delta value map and simulated thickness-delta relationships.

    • Main Results:

    • The technique successfully measured the thickness distribution of dried protein films.
    • Angular deviation from normal incidence minimally affected the psi value (0.97 factor max).
    • Obtained thickness maps showed good agreement with mechanical scanning, with a detection limit of +/- 0.2 nm.

    Conclusions:

    • The described imaging ellipsometer technique is effective for measuring thin film thickness distribution.
    • The inclusion of a high-index TiO2 layer significantly improves measurement sensitivity and precision.
    • This method offers a precise and sensitive approach for analyzing thin films on transparent substrates.