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Updated: Aug 14, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
Nonlithographic micro- and nanopatterning of TiO2 using polymer stamped molecular templates
Hiroaki Tokuhisa1, Paula T Hammond
1Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA.
Abstract:
The polymer-on-polymer stamping technique was used to template patterned TiO2 onto polymer thin films. Polystyrene-b-polyvinyl pyridine diblock copolymer (PS-b-PVP) was stamped on a layer-by-layer assembled thin film of poly(allylamine hydrochloride) and poly(acrylic acid). After rinsing the surface with a good solvent for the block copolymer, an adsorbed PS-b-PVP monolayer remained on the polyelectrolyte film, resulting in a pattern of alternating hydrophobic and carboxylic acid containing hydrophilic regions. The surface was used as a template for the selective deposition of TiO2 on the multilayer surface, using an acid-catalyzed hydrolysis of(NH4)2TiF6. Using this novel approach, we have successfully demonstrated the patterning of TiO2 film on a polyelectrolyte multilayer. Finally, nanoscale features consisting of 200 nm lines alternating with a 350 nm period was accomplished. This paper represents the first such attempt to create an all-polymer nonlithographic template for the directed deposition of TiO2 or related metal oxides; this technique, which utilizes the versatile polyelectrolyte multilayer process, enables the construction of complex polymer-inorganic microstructures suitable for electrooptical and photonic applications.

