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Preparation of Nanoparticles for ToF-SIMS and XPS Analysis
Published on: September 13, 2020
[Determination of Sn/In in the ITO film by emission spectral method]
Guang Pu Xue Yu Guang Pu Fen Xi = Guang Pu
|April 7, 2005
Abstract:
In the film sample analysis, the consstence within standard sample and analytical sample is discussed by emission spectral method. Using spark light source and moving electrode, the content of Sn/In in the ITO film is obtained by repeatedly exposing four samples. The accuracy and precision are satisfying.
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