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Related Experiment Videos

Electron distribution on a tilted sample in the high pressure SEM.

R Belkorissat1, A Kadoun, B Khelifa

  • 1Laboratoire d'Elaboration et de Caractérisation des Matériaux, Université Djilali Liabès de Sidi Bel-Abbès, BP 89, 22000 Sidi Bel Abbès, Algeria. belkhorissat_r@yahoo.fr

Micron (Oxford, England : 1993)
|April 29, 2005
PubMed
Summary

Specimen inclination in a high-vacuum scanning electron microscope (HVSEM) broadens electron profiles. This tilt angle effect modifies electron distribution, complicating X-ray microanalysis in low-vacuum conditions.

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Area of Science:

  • Materials Science
  • Physics
  • Analytical Chemistry

Background:

  • High-vacuum scanning electron microscopy (HVSEM) is crucial for surface analysis.
  • Understanding electron beam interactions with specimen surfaces is key for accurate microanalysis.
  • Specimen tilt can significantly alter electron scattering patterns.

Purpose of the Study:

  • To investigate the impact of specimen inclination on electron distribution at the surface in an HVSEM.
  • To quantify the relationship between tilt angle and electron profile broadening.
  • To assess the implications for X-ray microanalysis.

Main Methods:

  • Monte Carlo simulations were employed to model electron beam interactions.
  • Electron distribution profiles were analyzed at various specimen tilt angles.

Related Experiment Videos

  • The r(0.9) radius was correlated with the tilt angle.

    • Main Results:

    • A broadening of the electron profile was observed as the tilt angle increased.
    • A relationship between the r(0.9) radius and the tilt angle was established.
    • The electron distribution profile transformed into an inclined truncated shape, deviating from classical scattering.

    Conclusions:

    • Specimen inclination significantly modifies electron distribution at the sample surface in HVSEM.
    • The observed changes confirm challenges in performing accurate X-ray microanalysis under low-vacuum conditions.
    • The proposed relationship aids in predicting and correcting for tilt-induced artifacts.