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Harmonic suppression and defect enhancement using Schlieren processing.

Eugenio Garbusi1, José A Ferrari, César D Perciante

  • 1Instituto de Fisica, Facultad de Ingenieria, Universidad de la Republica, J. Herrera y Reissig 565, Montevideo 11300, Uruguay. egarbusi@fing.edu.uy

Applied Optics
|June 3, 2005
PubMed
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The Schlieren technique suppresses harmonics in periodic amplitude-modulated light waves. This method enhances defects in periodic structures, aiding in defect detection for photomasks and semiconductor wafers.

Area of Science:

  • Optics and Photonics
  • Materials Science
  • Metrology

Background:

  • The Schlieren technique is a standard method for visualizing phase objects using coherent light.
  • Its application to amplitude-modulated (AM) periodic signals has not been extensively studied.

Purpose of the Study:

  • To investigate the effect of Schlieren processing on amplitude-modulated periodic light waves.
  • To explore the potential of Schlieren imaging for defect detection in periodic structures.

Main Methods:

  • Applying Schlieren processing to simulated and experimental amplitude-modulated periodic light waves.
  • Analyzing the harmonic content of the processed images.
  • Evaluating the enhancement of artificial defects within periodic structures.

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Main Results:

  • Schlieren processing significantly suppresses higher harmonics in periodic AM light waves.
  • Defects present in the periodic structure are enhanced relative to the periodic carrier in the Schlieren image.
  • The technique demonstrates sensitivity to simulated faults in periodic patterns.

Conclusions:

  • Schlieren imaging offers a method to reduce harmonic content in periodic AM light.
  • The technique is effective for enhancing and detecting defects in periodic structures.
  • Potential applications include quality control for photomasks and semiconductor wafers.