Eugenio Garbusi1, José A Ferrari, César D Perciante
1Instituto de Fisica, Facultad de Ingenieria, Universidad de la Republica, J. Herrera y Reissig 565, Montevideo 11300, Uruguay. egarbusi@fing.edu.uy
You might also read
Articles linked to this work by shared authors, journal, and citation graph.
The Schlieren technique suppresses harmonics in periodic amplitude-modulated light waves. This method enhances defects in periodic structures, aiding in defect detection for photomasks and semiconductor wafers.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: