Alternative method for fabricating chemically functionalized AFM tips: silane modification of HF-treated Si3N4 probes

An alternative method for fabricating functionalized, atomic force microscopy (AFM) tips is presented. This technique is simple and requires only minimal preparation and tip modification to generate chemically sensitive probes that have a robust organic monolayer of flexible terminal chemistry attached to the surface. Specifically, commercially microfabricated Si3N4 AFM tips were modified with self-assembled monolayers (SAMs) of octadecyltrichlorosilane and (11-bromoundecyl)trichlorosilane after removing the native silicon oxide surface layer with concentrated hydrofluoric acid. The structure of these SAM films on solid silicon nitride surfaces was studied using contact angle goniometry and Fourier transform infrared spectroscopy. Pull-off force measurements on various bare (mica, graphite, and silicon) and SAM-functionalized substrates confirm that mechanically robust, long-chain organic silane SAMs can be formed on HF-treated Si3N4 tips without the presence of an intervening oxide layer. Adhesion experiments show that the integrity of the organic film on the chemically modified tips is maintained over repeated measurements and that the functionalized tips can be used for chemical sensing experiments since strong discrimination between different surface chemistries is possible.