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Related Experiment Videos

Interfacial effects on moisture absorption in thin polymer films.

Bryan D Vogt1, Christopher L Soles, Ronald L Jones

  • 1Polymers Division and Center for Neutron Research, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.

Langmuir : the ACS Journal of Surfaces and Colloids
|July 1, 2005
PubMed
Summary

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Thin polymer films swell more due to water accumulation at the substrate interface. This interfacial water layer significantly impacts moisture absorption in photoresist films, especially for thinner samples.

Area of Science:

  • Materials Science
  • Polymer Science
  • Surface Science

Background:

  • Understanding moisture absorption in polymer films is crucial for microelectronics and coatings.
  • Photoresists, used in lithography, can be sensitive to environmental humidity, affecting device performance.
  • Previous studies have not fully elucidated the role of substrate interactions on film swelling.

Purpose of the Study:

  • To investigate the thickness-dependent moisture absorption in model photoresist films.
  • To determine the influence of the silicon substrate on water uptake and swelling behavior.
  • To quantify the water concentration profile within the films.

Main Methods:

  • X-ray reflectivity and neutron reflectivity were employed to measure film thickness changes and water content.

Related Experiment Videos

  • Model photoresist films of poly(4-hydroxystryene) (PHOSt) and poly(tert-butoxycarboxystyrene) (PBOCSt) on silicon wafers were used.
  • A model was developed to correlate interfacial water accumulation with observed swelling.

    • Main Results:

    • Moisture absorption and swelling were found to be dependent on the initial film thickness, with thinner films exhibiting enhanced swelling.
    • A water-rich layer (approx. 30 vol % water) of 25 ± 10 Å was identified at the silicon/polymer interface.
    • This interfacial water accumulation, driven by substrate attraction, dominates swelling in thin films.
    • The interfacial excess layer was independent of the specific polymer used.

    Conclusions:

    • The hydrophilic silicon substrate induces significant water accumulation at the interface, leading to enhanced swelling in thin photoresist films.
    • This interfacial effect is a primary driver of thickness-dependent moisture absorption.
    • The developed model accurately represents the observed swelling behavior, highlighting the importance of interfacial phenomena.