Hybrid sample-inverted reflow and soft-lithography technique for fabrication of conicoid microlens arrays

We report a cost-effective fabrication method, with a combination of the sample-inverted reflow technique and the soft-lithography replication method, to fabricate conicoid refractive microlens arrays (MLAs), including hyperboloid, paraboloid, and ellipsoid MLAs in inorganic-organic hybrid SiO2-ZrO2 solgel material. The fabrication procedures involve two basic steps. First, a master of the conicoid MLA was made in photoresist by the sample-inverted reflow technique. Second, we built a negative mold of the master by casting polydimethylsiloxane (PDMS) onto a silicone elastomer against the master, and then the profile was imprinted onto the solgel glass. As a result, the fabricated solgel MLAs have been obtained with excellent smooth profiles, having negligible discrepancies from the profiles of ideal conicoid MLAs.