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[Soft X-ray reflectometer with laser produced plasma source].

Bo Chen1, Qi-liang Ni, Ji-hong Cao

  • 1State Key Lab of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130022, China.

Guang Pu Xue Yu Guang Pu Fen Xi = Guang Pu
|July 15, 2005
PubMed
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A new soft X-ray reflectometer utilizing a laser-produced plasma source offers precise measurements for gratings, filters, and multilayer coatings. This advanced instrument demonstrates high accuracy and reproducibility for optical component characterization.

Area of Science:

  • Physics
  • Materials Science
  • Optics

Context:

  • Characterizing optical components in the soft X-ray spectrum is crucial for advanced applications.
  • Existing reflectometry methods may have limitations in precision or spectral range.
  • Development of novel instrumentation is needed for accurate optical property measurements.

Purpose:

  • To present a novel soft X-ray reflectometer developed in-house.
  • To detail the components and capabilities of the soft X-ray laser-produced plasma reflectometer.
  • To validate the reflectometer's performance through measurements of multilayer coatings.

Summary:

  • A soft X-ray reflectometer was engineered using a laser-produced plasma source.
  • The instrument features a grazing incidence monochromator, vacuum chamber, and computer control for wavelengths of 8-30 nm.

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  • Measurements of multilayer coating reflectivity showed excellent agreement with theoretical calculations, with +/-0.6% reflectance reproducibility.

    • Impact:

    • Enables precise characterization of gratings, filters, and multilayer coatings in the soft X-ray range.
    • Provides a reliable tool for quality control and development of advanced optical materials.
    • Advances the field of soft X-ray optics and metrology through improved instrumentation.