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Related Experiment Videos

Utilizing the charging effect in scanning electron microscopy.

Hai-Bo Zhang1, Ren-Jian Feng, Katsumi Ura

  • 1Department of Electronic Science & Technology, Xi'an Jiaotong University, Xi'an 710049, People's Republic of China. hbzhang@mail.xjtu.edu.cn

Science Progress
|July 21, 2005
PubMed
Summary

Electron beam irradiation induces charging effects in insulating specimens, enabling novel imaging in scanning electron microscopy (SEM). This charging contrast reveals underlying structures through insulating layers, offering new testing methods for integrated circuits.

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Area of Science:

  • Materials Science
  • Physics
  • Microscopy

Background:

  • Electron beam (e-beam) irradiation of insulating specimens causes charging effects.
  • Scanning electron microscopy (SEM) traditionally relies on surface characteristics for imaging.
  • Conventional SEM methods struggle to image structures beneath insulating layers.

Purpose of the Study:

  • To explore the utilization of electron beam-induced charging effects for enhanced SEM imaging.
  • To investigate a novel imaging pattern, charging contrast, for observing subsurface structures.
  • To understand the mechanism behind dynamic charging contrast.

Main Methods:

  • Experimental investigation of electron beam irradiation on insulating specimens.
  • Observation of charging contrast in SEM.

Related Experiment Videos

  • Analysis of secondary electron redistribution under local surface fields.

    • Main Results:

    • Charging contrast allows imaging of conductors and overlay marks beneath insulating thin films, even with low-energy electron beams.
    • Dynamic charging contrast reveals underlying structures without external signals.
    • The contrast mechanism is attributed to differential secondary electron redistribution rates.

    Conclusions:

    • Charging contrast is a viable method for extending SEM applications.
    • This technique offers potential for new testing methods in integrated circuit development.
    • The findings highlight the utility of exploiting charging effects for subsurface imaging.