M Calleja1, M Nordström, M Alvarez
1Biosensors Group, Nacional Center of Microelectronics (CNM-CSIC), Isaac Newton 8, Tres Cantos, E-28760 Madrid, Spain. mcalleja@imm.cnm.csic.es
We developed a new microcantilever fabrication technology using SU-8 polymer for enhanced biosensor sensitivity. This novel approach improves target detection sensitivity sixfold compared to silicon nitride cantilevers.
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