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Depth profiling with modified dc-Grimm and rf-Grimm-type glow discharges operated with high gas flow rates and

Jorge Pisonero1, Ingo Feldmann, Nerea Bordel

  • 1Department of Physics, University of Oviedo, c/Calvo Sotelo s/n, 33007 Oviedo, Spain.

Analytical and Bioanalytical Chemistry
|July 30, 2005
PubMed

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