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Near-infrared spectroscopy for monitoring wafer etchant solution using a teflon tube

Youngbok Lee1, Sanghee Nah, Hankyu Namkung

  • 1Department of Chemistry, College of Natural Sciences, Hanyang University, Haengdang-Dong, Seongdong-Gu, Seoul, Korea 133-791.

Applied Spectroscopy
|August 2, 2005
PubMed
Abstract

No abstract available in PubMed .

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