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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Temperature-compensated cuts for length-extensional and flexural vibrating modes in GaPO4 beam resonators

Laurent Delmas1, Fabrice Sthal, Emmanuel Bigler

  • 1FEMTO-ST Institute, Department LCEP, Ecole Nationale Supérieure de Mécanique et des Microtechniques, 25030 Besançon Cedex, France.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|August 3, 2005
PubMed

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