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Temperature selective deposition of Parylene-C
E M Charlson1, E J Charlson, R Sabeti
1Department of Electrical and Computer Engineering, University of Missouri-Columbia 9104916.
IEEE Transactions on Bio-Medical Engineering
|February 1, 1992
Summary
A novel technique uses electrical heating to create openings in biocompatible Parylene-C coatings for implantable circuits. This method ensures precise coating deposition, enhancing device functionality and longevity.
Area of Science:
- Biomedical Engineering
- Materials Science
- Microelectronics
Background:
- Implantable integrated circuits require protective, biocompatible coatings.
- Achieving selective coating deposition on complex microelectronic structures is challenging.
- Parylene-C is a widely used biocompatible conformal coating material.
Purpose of the Study:
- To present a new method for selective Parylene-C deposition on implantable integrated circuits.
- To demonstrate the use of electrical heating for creating openings in Parylene-C coatings.
- To compare theoretical predictions with actual Parylene-C thickness.
Main Methods:
- Utilizing thin film or diffused resistors for localized electrical heating.
- Applying heat to specific areas of the integrated circuit to create openings in the Parylene-C coating.
- Measuring and comparing the actual deposited Parylene-C thickness against theoretical predictions.
Main Results:
- Successfully demonstrated selective deposition of conformal Parylene-C coatings.
- Localized electrical heating effectively created desired openings in the coating.
- Validation of Parylene-C thickness through comparison of predicted and actual measurements.
Conclusions:
- The described method offers a viable approach for selective Parylene-C coating of implantable microelectronic devices.
- Electrical heating provides a precise and controllable way to pattern conformal coatings.
- This technique can improve the fabrication and performance of implantable electronic systems.