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All-fiber high-sensitivity pressure sensor with SiO2 diaphragm
Denis Donlagic1, Edvard Cibula
1Faculty of Electrical Engineering and Computer Science, University of Maribor, Smetanova 17, 2000 Maribor, Slovenia. ddonlagic@uni-mb.si
Optics Letters
|September 1, 2005
Summary
A miniature fiber Fabry-Perot pressure sensor was developed using a silicon dioxide diaphragm. This novel design achieves high sensitivity and low-cost production for disposable pressure sensing applications.
Area of Science:
- Optical Engineering
- Sensor Technology
- Materials Science
Background:
- Miniature pressure sensors are crucial for various applications.
- Existing sensors may face limitations in sensitivity, cost, or disposability.
- Fiber optic sensors offer advantages in harsh environments and remote sensing.
Purpose of the Study:
- To design and fabricate a miniature fiber Fabry-Perot pressure sensor.
- To achieve high sensitivity and good repeatability in the sensor.
- To develop a simple and low-cost fabrication technique for disposable pressure sensors.
Main Methods:
- Fabrication of a miniature fiber Fabry-Perot sensor (125 microm diameter).
- Utilized a thin silicon dioxide (SiO2) diaphragm fusion spliced to a hollow optical fiber.
- Employed on-line tuning of diaphragm thickness for enhanced sensor performance.
Main Results:
- Demonstrated pressure ranges from 0-40 kPa to 0-1 MPa.
- Achieved a maximum sensitivity of 1.1 rad/40 kPa at 1550 nm.
- Practical demonstration of a pressure resolution of 300 Pa.
Conclusions:
- The developed sensor exhibits high sensitivity and repeatability.
- The fabrication technique is simple, low-cost, and suitable for disposable sensors.
- This technology offers a viable solution for miniature, disposable pressure sensing.