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Updated: Aug 16, 2026

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Selective placement of carbon nanotubes on metal-oxide surfaces
J B Hannon1, A Afzali, Ch Klinke
1IBM Research Division, T.J. Watson Research Center, Yorktown Heights, New York 10598, USA. jbhannon@us.ibm.com
Abstract:
We describe a method to selectively position carbon nanotubes on Al2O3 and HfO2 surfaces. The method exploits the selective binding of alkylphosphonic acids to oxide surfaces with large isoelectric points (i.e. basic rather than acidic surfaces). We have patterned oxide surfaces with acids using both microcontact printing and conventional lithography. With proper choice of the functional end group (e.g., -CH3 or -NH2), nanotube adhesion to the surface can be either prevented or enhanced.

