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Updated: Aug 15, 2026

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
10:39

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics

Published on: August 5, 2020

Suppression of spurious lateral modes in thickness-excited FBAR resonators

Daniel Rosén, Johan Bjurström, Ilia Katardjiev

    IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
    |October 11, 2005
    PubMed

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