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Updated: Aug 15, 2026
Cooling Rate Dependent Ellipsometry Measurements to Determine the Dynamics of Thin Glassy Films
Published on: January 26, 2016
Substrate temperature effect on the refractive index and a two-step film method to detect small inhomogeneities in
Fachun Lai1, Ming Li, Kang Chen
1Hefei National Laboratory for Physical Sciences at Microscale, University of Science and Technology of China, Hefei, Anhui 230026, People's Republic of China.
Abstract:
Nb2O5 films were deposited by a reactive magnetron sputtering technique. The average refractive index was found to increase with the rise of substrate temperature. Modulated interference transmittance spectra were observed in the two-step films, which were prepared by stopping the deposition process in the middle of the designed sputtering time, and then, after a full cooling down to room temperature, starting the same deposition process again to complete the whole preparation of the films. A linearly graded-index model was used to explain the interference behavior. It was proved that the two-step film method was sensitive to the small inhomogeneity in the films. We also suggest that the inhomogeneity of sputtered films can be minimized by controlling the substrate temperature at a constant value.
