Matt Novak1, James Millerd, Neal Brock
1Optical Sciences Center, University of Arizona, Tucson, Arizona 85721, USA. mnovak@optics.arizona.edu
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A new dynamic interferometer uses CCD pixel-level phase-shifting for vibration-insensitive measurements. Component errors are minimal, with most measurement errors below 0.005 lambda, and are reduced by high-rate data acquisition.
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