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Updated: Aug 14, 2026

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Evidence of sequential lift in growth of aligned multiwalled carbon nanotube multilayers
Mathieu Pinault1, Vincent Pichot, Hicham Khodja
1Laboratoire Francis Perrin (CEA CNRS URA 2453), DSM-DRECAM-SPAM, CEA Saclay, 91191 Gif sur Yvette, France.
Abstract:
We synthesized aligned multiwalled carbon nanotube multilayers by aerosol-assisted catalytic chemical vapor deposition through sequential injections of aerosols containing both carbon and catalyst precursors. Each sequence was traced by a specific duration or precursor mixture, with the carbon source being possibly enriched in (13)C isotope labels. We discovered that any sequence involved the growth of a new layer on the substrate surface, under any pre-existing one by lifting it up, giving definitive evidence of a base-growth mechanism.

