Hydrolysis of fluorosilanes: a theoretical study

Hydrolysis and condensation of simple trifluorosilanes, HSiF3 and MeSiF3, was studied by quantum mechanical methods. Hydrolysis of fluorosilanes is highly endothermic. The Gibbs free energy of the first reaction step in the gas phase is 31.4 kJ/mol, which corresponds to an equilibrium constant of 10(-6). Hydrolysis of the subsequent fluorine atoms in trifluorosilanes is thermodynamically more unfavorable than the first step of substitution. No significant difference in thermodynamics of hydrolysis was found between HSiF3 and MeSiF3. The activation energy for hydrolysis by a water dimer is significantly lower than that for hydrolysis by a water monomer. The former reaction is also less unfavorable thermodynamically, due to a high binding energy of the HF-H2O complex formed as a product of hydrolysis. Self-consistent reaction field (SCRF) calculations show that hydrolysis of trifluorosilanes in aqueous medium has lower activation energy than in the gas phase. It is also thermodynamically less unfavorable, due to better solvation of the products. Homofunctional condensation of HSiF2OH is thermodynamically favored. The equilibrium mixture for hydrolysis/condensation of RSiF3 in water is predicted to contain ca. 2.3% disiloxane (HF2Si)2O, if 100-fold excess of water relative to silane is assumed. Further hydrolysis of (HF2Si)2O is negligible. The thermodynamics of fluorosilane hydrolysis contrasts with that of chlorosilanes, where both hydrolysis and condensation are strongly favorable. Moreover, in the case of trichlorosilanes each subsequent hydrolysis step is more facile, leading to the product of full hydrolysis, RSi(OH)3.