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Long-working-distance incoherent-light interference microscope.

Michael B Sinclair1, Maarten P de Boer, Alex D Corwin

  • 1Sandia National Laboratories, Albuquerque, New Mexico 87185, USA.

Applied Optics
|December 31, 2005
PubMed
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A new long-working-distance interference microscope offers advanced microsystem characterization. This innovative design overcomes limitations of traditional microscopes, enabling detailed imaging in challenging environments.

Area of Science:

  • Optical microscopy
  • Microsystem characterization
  • Interferometry

Background:

  • Growing demand for advanced microsystem characterization tools.
  • Limitations of traditional interference microscopes, such as Linnik systems, in preserving working distance and objective matching.
  • Need for adaptable microscopy solutions for complex sample environments.

Purpose of the Study:

  • To design and operate a novel long-working-distance, incoherent light interference microscope.
  • To overcome the requirement for matched objectives in Linnik interference microscopes.
  • To enable interference imaging in challenging environments, including those with intervening windows.

Main Methods:

  • Development of a modified Linnik interference microscope design.

Related Experiment Videos

  • Implementation of an adjustable optical configuration for the reference arm.
  • Matching of optical path length, wavefront curvature, and dispersion between sample and reference arms for various long-working-distance objectives (5x, 10x, 20x).

    • Main Results:

    • Preservation of the full working distance of long-working-distance objectives.
    • Successful interference image acquisition with intervening windows (e.g., for packaged microsystems, microfluidic devices).
    • Compatibility with advanced imaging techniques including phase-shifting interferometry, vertical scanning interferometry, and stroboscopic measurements.

    Conclusions:

    • The developed interference microscope provides a versatile tool for microsystem characterization.
    • The design facilitates imaging in previously inaccessible environments, such as environmental chambers and vacuum systems.
    • The microscope's adaptability and compatibility with multiple interferometric techniques enhance its utility for dynamic process studies.