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Related Experiment Videos

High-temperature stability multilayers for extreme-ultraviolet condenser optics.

Sasa Bajt1, Daniel G Stearns

  • 1Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, California 94550, USA. bajt@llnl.gov

Applied Optics
|December 31, 2005
PubMed
Summary
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Mo/SiC multilayer coatings show structural changes upon heating. After thermal relaxation, these coatings remain stable up to 400°C, indicating potential for high-temperature applications.

Area of Science:

  • Materials Science
  • Nanotechnology
  • Thin Film Technology

Background:

  • Mo/SiC multilayer coatings are used in various applications.
  • Understanding their thermal stability is crucial for performance at elevated temperatures.

Purpose of the Study:

  • To investigate the thermal stability of Mo/SiC multilayer coatings.
  • To characterize structural transformations upon annealing.

Main Methods:

  • Transmission electron microscopy (TEM) was used for structural analysis.
  • X-ray diffraction (XRD) was employed to study phase transformations.

Main Results:

  • Annealing induced a structural relaxation in the as-deposited multilayers.
  • Polycrystalline Mo transformed into an amorphous Mo-Si-C alloy.

Related Experiment Videos

  • Amorphous SiC transformed into crystalline SiC.
  • The relaxed multilayer structure demonstrated stability up to 400°C.

    • Conclusions:

    • Mo/SiC multilayers undergo significant structural changes upon heating.
    • A thermally induced relaxation process leads to a stable amorphous Mo-Si-C/crystalline SiC structure.
    • These findings suggest suitability for applications requiring thermal stability up to 400°C.