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An ultrasonic linear motor using ridge-mode traveling waves
Masahiko Tominaga1, Ryuta Kaminaga, James R Friend
1Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama, Japan 226-8503.
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|December 31, 2005
Summary
This study introduces a novel ultrasonic linear motor utilizing traveling waves on a ridge waveguide. The design enables precise slider movement and bidirectional control, paving the way for integrated micro-motor systems.
Area of Science:
- Mechanical Engineering
- Materials Science
- Nanotechnology
Background:
- Ultrasonic motors offer precise motion control.
- Existing designs face limitations in miniaturization and integration.
Purpose of the Study:
- To develop a novel ultrasonic linear motor using traveling waves on a ridge waveguide.
- To achieve precise, bidirectional motion for micro-motor applications.
Main Methods:
- Excitation of fundamental mode traveling waves along a ridge waveguide using a Langevin transducer.
- Utilizing lossy media or dampers to prevent wave reflection.
- Implementing a second transducer with phase control for bidirectional movement.
Main Results:
- Successful excitation of traveling waves for linear motion.
- Demonstrated slider movement against the wave direction.
- Achieved bidirectional control by adjusting transducer phase difference.
Conclusions:
- A simple, effective ultrasonic linear motor design has been demonstrated.
- The technology holds potential for integration into semiconductor substrates for micro-systems.
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