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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
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Bending mode effect on sensitivity of plate surface acoustic wave pressure sensors

Jiashi S Yang1, Xiaomeng Yang, Yuantai Hu

  • 1Department of Engineering Mechanics, University of Nebraska, Lincoln, NE 68588-0526, USA. jyang1@unl.edu

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|December 31, 2005
PubMed

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