Related Experiment Video
Updated: Aug 13, 2026

Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition
Published on: August 29, 2017
Highly reflecting aluminum-protected optical coatings for the vacuum-ultraviolet spectral range
Minghong Yang1, Alexandre Gatto, Norbert Kaiser
1Fraunhofer-Institut für Angewandte Optik und Feinmechanik, Albert Einstein Strasse 7, Jena 07745, Germany. minghong.yang@iof.fraunhofer.de
Abstract:
We discuss the approaches to preserve the high-reflectance aluminum mirror for the vacuum-ultraviolet spectral region. Single fluoride and oxide layers, a homogeneous multilayer, and hybrid multilayer solutions are put forward. Single fluoride and oxide materials have achieved reflectance above 90% at 193 nm. Multilayer capping can provide reflectance of 93.4% at 193 nm, and a hybrid multilayer of fluoride and oxide can achieve reflectance above 90% to 160 nm.
More Related Videos
Related Concept Videos
UV–Vis Spectrometers
Ultraviolet and Visible (UV–Vis) Spectroscopy: Overview

