X-ray topography analysis of acoustic wave fields in the SAW-resonator structures

Dmitry V Roshchupkin1, Helen D Roshchupkina, Dmitry V Irzhak

  • 1Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Laboratory of X-ray Acoustooptics, Chernogolovka, Russian Federation. rochtch@ipmt-hpm.ac.ru