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Updated: Aug 11, 2026

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Influence of material parameters on acoustic wave propagation modes in ZnO/Si bi-layered structures
Hui-dong Gao1, Shu-Yi Zhang, Xue Qi
1Lab of Modern Acoustics, Institute of Acoustics, Nanjing University, Nanjing, 210093, China. paslab@nju.edu.cn
Abstract:
The influences of material properties on acoustic wave propagation modes in ZnO/Si bi-layered structures are studied. The transfer matrix method is used to calculate dispersion relations, wave field distributions, and electromechanical coupling coefficients of acoustic wave propagation modes in ZnO/Si bi-layered systems, in which the thickness of the substrate is of the same order of magnitude as the wavelength of the propagating wave modes. The influences of the thin film parameters on the acoustic wave propagation modes and their electromechanical coupling coefficients of the wave modes also are obtained. In addition, some experimental results for characterizing the wave propagation modes and their frequencies have also been obtained, which agree well with the theoretical predictions.
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