Application of Taguchi robust design method to SAW mass sensing device

Der Ho Wu1, Hsin Hua Chen

  • 1Microsystems Simulation and Design Lab, Department of Mechanical Engineering, National Pingtung University of Science and Technology, Neipu Hsiang, Pingtung, Taiwan, ROC 91207. derhowu@mail.npust.edu.tw

Summary

This study uses Taguchi analysis to enhance surface acoustic wave (SAW) gas sensors, improving sensitivity and reducing variability for accurate CO2 detection. Finite-element analysis confirms the robust design