Method for calibrating system parameters of a multidirectional interferometers system

Area of Science:

• Metrology and Instrumentation
• Optical Measurement Systems
• Precision Engineering

Background:

• Multidirectional interferometer systems are crucial for high-accuracy position and orientation measurement of stages.
• Accurate determination of system parameters (reflector positions, ray directions) is essential but challenging.
• Existing calibration methods lack systematic approaches for complex systems.

Purpose of the Study:

• To propose and validate a systematic method for calibrating multidirectional interferometer systems.
• To address the challenge of determining system parameters with high accuracy.
• To enable reliable performance of positioning stages in various applications.

Main Methods:

• Developed a systematic calibration procedure for multidirectional interferometers.
• Applied the method when the number of interferometers exceeds the stage's degrees of freedom.
• Verified the proposed method using both computational simulation and experimental validation.

Main Results:

• The proposed systematic calibration method effectively determines necessary system parameters.
• Validation through simulation and experiment confirmed the method's accuracy and reliability.
• The technique is particularly useful for two-dimensional positioning stages.

Conclusions:

• A robust and systematic method for calibrating multidirectional interferometer systems has been successfully developed.
• This calibration approach enhances the accuracy of position and orientation measurements for positioning stages.
• The validated method offers a practical solution for complex metrology systems in precision engineering.