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Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
Quantitative nanotribology by AFM: a novel universal calibration platform
Ewa Tocha1, Holger Schönherr, G Julius Vancso
1MESA+ Institute for Nanotechnology and Faculty of Science and Technology, University of Twente, Department of Materials Science and Technology of Polymers, 7500 AE Enschede, The Netherlands.
Langmuir : the ACS Journal of Surfaces and Colloids
|February 24, 2006
Summary
A new silicon standard specimen improves atomic force microscopy (AFM) friction force measurements. This universal standard, used with a direct wedge calibration method, reduces calibration errors to approximately 5% for accurate nanotribology.
Area of Science:
- Surface science and nanotechnology
- Materials science
- Mechanical engineering
Background:
- Quantitative friction force measurements using atomic force microscopy (AFM) are crucial in nanotribology.
- Existing calibration methods for AFM friction force measurements often yield large errors and lack reproducibility.
- Accurate calibration requires determining the cantilever's torsional spring constant and the photodiode's lateral sensitivity.
Purpose of the Study:
- To develop and validate a universally applicable standard specimen for accurate AFM cantilever and tip calibration.
- To improve the precision and reproducibility of quantitative friction force measurements in nanotribology.
- To enable convenient and accurate nanotribological measurements across a wide range of materials.
Main Methods:
- Fabrication of a Si(100) standard specimen with precisely defined notches using focused ion beam (FIB) milling.
- Application of the improved wedge calibration method for simultaneous determination of cantilever spring constant and photodiode lateral sensitivity.
- Testing the calibration standard with various Si3N4 integrated cantilever-tip assemblies and different material samples.
Main Results:
- The new Si(100) standard specimen, when used with the direct wedge method, yields calibration factors with an error of approximately 5%.
- This represents a significant improvement over traditional two-step calibration procedures, which exhibit errors of 30-50%.
- Quantitative friction force measurements were successfully demonstrated on oxidized Si(100), PMMA thin films, and self-assembled monolayers on gold.
Conclusions:
- The developed universal standard specimen provides a highly accurate and reproducible method for calibrating AFM for nanotribology.
- The combined use of the standard specimen and the direct wedge calibration method simplifies and enhances quantitative friction force measurements.
- This advancement facilitates reliable nanotribological studies across diverse materials and applications.

