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Updated: Aug 11, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Development of a scanning tunneling microscope for in situ experiments with a synchrotron radiation hard-X-ray
Akira Saito1, Junpei Maruyama, Ken Manabe
1Department of Material and Life Science, Osaka University, Osaka 565-0871, Japan. saito@prec.eng.osaka-u.ac.jp
Abstract:
A scanning tunneling microscope dedicated to in situ experiments under the irradiation of highly brilliant hard-X-rays of synchrotron radiation has been developed. In situ scanning tunneling microscopy (STM) observation was enabled by developing an accurate alignment system in ultrahigh vacuum. Despite the noisy conditions of the synchrotron radiation facility and the radiation load around the probe tip, STM images were successfully obtained at atomic resolution. Tip-current spectra were obtained for Ge nano-islands on a clean Si(111) surface by changing the incident photon energy across the Ge absorption edge. A current modification was detected at the absorption edge with a spatial resolution of the order of 10 nm.
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